KXR94 series accelerometers and inclinometers smallpackage5x5x1.2mmdfn multiplexedanalogordigitalspiinterface internal1khzlowpassfilter lownoise leadfreesolderability excellenttemperatureperformance highshocksurvivability lowpowerconsumption userdefinablebandwidth factoryprogrammableoffsetandsensitivity selftestfunction features kionix is a registered trademark of kionix, inc. products described herein are protected by patents issued or pending. information provided in this document is believed to be accurate and rel iable but is not guaranteed. kionix does not assum e responsibility for its use or distribution. no license is granted by implication or otherwise u nder any patent or other rights of kionix. kionix reserves the right to change product specifications or discontinue this product at any t ime without prior notice. ? kionix 2008 all rights reserved october 2, 2008 rev. 1.2 page 1 of 2 these highperformance silicon micromachined linear accelerometers and inclinometers consist of a sensor element and an as ic packaged in a 5x5x1.2mmdualflatnolead(dfn).thesensoreleme ntisfabricatedfrom singlecrystal silicon with proprietary deep reacti ve ion etching (drie) processes,andisprotectedfromtheenvironmentby ahermeticallysealed siliconcapatthewaferlevel. the KXR94 series is designed to provide a high signaltonois e ratio with integrated temperature compensation that provides e xcellent performance overtemperature.thesesensorscanacceptsupply voltagesbetween2.5v and5.25v.sensitivityisfactoryprogrammableall owingcustomizationfor applications requiring from 1.0g to 5.0g ranges. sensor bandwidth is userdefinable. the sensor element functions on the principle of di fferential capacitance. acceleration causes displacement of a silicon struc ture resulting in a change in capacitance. an asic, using a standard c mos manufacturing process,detectsandtransformschangesincapacita nceintoananalogout put voltage,which is proportional to acceleration. the sense element de sign utilizes common mode cancellation to decrease errors from process variation and environmental stress. available in a nalog and multiplexed analogoutputsandserialperipheralinterface(spi ). proprietary technology 36thornwooddr.ithaca,ny14850usatel:6072 571080fax:6072571146www.kionix.cominfo @kionix.com markets applications \\ stabilitycontrol telematics/gps theftandaccidentalarms inertialnavigationanddeadreckoning gesturerecognition imagestabilization platformstabilization drillorientation cell phones and handheld pdas automotive personal navigation devices cameras and video equipment industrial
performance specifications parameters units KXR94-2050 KXR94-2353 condition range 1 g 2.0 factoryprogrammable sensitivity mv/g 660typical(673max) notapplicable 12bitoperation counts/g notapplicable 819target(835max) 0goffsetvs.temp. mg/c 0.2typical sensitivityvs.temp %/c 0.01(xy)0.02(z) typical noisedensity 45typical bandwidth 2 hz 800 3db nonlinearity %offs 0.1typical %offullscal eoutput ratiometricerror % 1.25(xy)0.2(z)typical 3.3v5% crossaxissensitivity % 2.0typical a/dconversiontime s notapplicable 40typical spicommunicationrate 3 mhz notapplicable 5typical powersupply v 3.3 standard currentconsumption ma 0.95typical operating a 5max standby environmental specifications parameters units KXR94-2050 KXR94-2353 condition operatingtemperature c 40to85(consumer/industrial) 40to125(automotive) storagetemperature c 55to150 unpowered mechanicalshock g 5000 poweredorunpowered, 0.5msechalversine esd v 3000 humanbodymodel powered KXR94 series accelerometers and inclinometers performance specifications theperformanceparametersbelowareprogrammedandt estedat3.3volts.however,thedevicecanbefactory programmedtoacceptsupplyvoltagesfrom2.5vto5.25 v.performanceparameterswillchangewithsupply voltagevariations. notes 1 customrangesfrom1.0gto5.0gavailable. 2 internallowpassfilter.lowerfrequenciesareu serdefinablewithexternalcapacitors. 3 spicommunicationratecanbeoptimizedforfaster communication. ordering guide product axis(es)of sensitivity range (g) sensitivity offset operating voltage(v) temperature ( c) package KXR94-1050 xyz 2 560(mv/g) 1.4v 2.8 40to+85 5x5x1.2dfn KXR94-2353 xyz 2 819(counts/g) 2048counts 3.3 40to+85 5x5 x1.2dfn KXR94-2050 xyz 2 660(mv/g) 1.65v 3.3 40to+85 5x5x1.2dfn KXR94-7050 xyz 2 660(mv/g) 1.65v 3.3 40to125 5x5x1.2dfn ouput muxanalog muxanalog digitalspi muxanalog KXR94-2283 xyz 2 1000(mv/g) 2.5v 5.0 muxanalog 40to+85 5x5x1.2dfn hz g / m ? kionix 2008 all rights reserved october 2, 2008 rev. 1.2 page 2 of 2
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